Multilayer Fresnel Zone Plates for X-ray Microscopy
نویسندگان
چکیده
منابع مشابه
Zone-doubled Fresnel zone plates for high-resolution hard X-ray full-field transmission microscopy
Full-field transmission X-ray microscopy is a unique non-destructive technique for three-dimensional imaging of specimens at the nanometer scale. Here, the use of zone-doubled Fresnel zone plates to achieve a spatial resolution better than 20 nm in the hard X-ray regime (8-10 keV) is reported. By obtaining a tomographic reconstruction of a Ni/YSZ solid-oxide fuel cell, the feasibility of perfor...
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Best resolutions in X-ray focusing are obtained to date by using diffractive lenses called Fresnel zone plates (FZPs). Their further improvement is nevertheless hindered by fundamental limitations in the employed manufacturing techniques. Here, we show a novel method to fabricate FZPs based on multilayer deposition with atomic layer deposition (ALD) and subsequent sectioning with focused ion be...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2015
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927615010715